JPH01127237U - - Google Patents

Info

Publication number
JPH01127237U
JPH01127237U JP2445388U JP2445388U JPH01127237U JP H01127237 U JPH01127237 U JP H01127237U JP 2445388 U JP2445388 U JP 2445388U JP 2445388 U JP2445388 U JP 2445388U JP H01127237 U JPH01127237 U JP H01127237U
Authority
JP
Japan
Prior art keywords
disc
conductive
electrode
wires
electrode plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2445388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2445388U priority Critical patent/JPH01127237U/ja
Publication of JPH01127237U publication Critical patent/JPH01127237U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2445388U 1988-02-24 1988-02-24 Pending JPH01127237U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2445388U JPH01127237U (en]) 1988-02-24 1988-02-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2445388U JPH01127237U (en]) 1988-02-24 1988-02-24

Publications (1)

Publication Number Publication Date
JPH01127237U true JPH01127237U (en]) 1989-08-31

Family

ID=31244313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2445388U Pending JPH01127237U (en]) 1988-02-24 1988-02-24

Country Status (1)

Country Link
JP (1) JPH01127237U (en])

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02108335U (en]) * 1989-02-17 1990-08-29
JP2006278652A (ja) * 2005-03-29 2006-10-12 Hitachi Kokusai Electric Inc 基板処理装置
JP2007251014A (ja) * 2006-03-17 2007-09-27 Hitachi Kokusai Electric Inc 基板処理装置
WO2009131048A1 (ja) * 2008-04-24 2009-10-29 シャープ株式会社 プラズマ処理装置およびそれを用いたプラズマ処理方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02108335U (en]) * 1989-02-17 1990-08-29
JP2006278652A (ja) * 2005-03-29 2006-10-12 Hitachi Kokusai Electric Inc 基板処理装置
JP2007251014A (ja) * 2006-03-17 2007-09-27 Hitachi Kokusai Electric Inc 基板処理装置
WO2009131048A1 (ja) * 2008-04-24 2009-10-29 シャープ株式会社 プラズマ処理装置およびそれを用いたプラズマ処理方法
JP2009267048A (ja) * 2008-04-24 2009-11-12 Sharp Corp プラズマ処理装置およびそれを用いたプラズマ処理方法

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